師資陣容
趙天生
教授
國立交通大學電子研究所博士
辦公室
科學三館 SC 306
電話
(03) 5131367
實驗室
先進半導體元件實驗室
科學三館 SC 704, 706 分機 56115
學歷
經歷
研究專長
重要著作
1985
國立交通大學電子工程 學士
1988
國立交通大學電子所 碩士
1992
國立交通大學電子所 博士
2021/02 -
教授, 國立陽明交通大學 電子物理系
2009/08 - 2011/07
系主任, 國立交通大學 電子物理系
2002/08 - 2021/01
教授, 國立交通大學 電子物理系
2002 - 2004
副主任, 國家奈米元件實驗室
2001/08 - 2002/07
副教授, 國立交通大學 電子物理系
1997/08 - 2001/07
兼任副、合聘教授, 國立清華大學 工程與系統科學學系
1992 - 2001
副研究員、研究員, 國科會國家毫微米元件實驗室
  1. 半導體元件物理
  2. 深次微米前段元件製程
  3. 奈米元件製作
  4. 薄膜電晶體
  5. 超薄絕緣層製備
  6. 半導體晶圓潔淨技術
  1. Y. Lee, C. C. Lee, Y. S. Kuo, S. W. Li, and T. S. Chao*, “Ultrathin Sub-5-nm Hf1-xZrxO2 for a Stacked Gate-all-Around Nanowire Ferroelectric FET With Internal Metal Gate,” IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY, 9, pp. 236-241, 2021.
  2. S. Kuo, S. Y. Lee, C. C. Lee, S. W. Li, T. S. Chao*, “CMOS-Compatible Fabrication of Low-Power Ferroelectric Tunnel Junction for Neural Network Applications,” IEEE TRANSACTIONS ON ELECTRON DEVICES, 68(2), pp. 879-884, 2021.
  3. H. Shen, W. Y. Chen, S. Y. Lee, P. Y. Kuo, and T. S. Chao*, “Nitride Induced Stress Affecting Crystallinity of Sidewall Damascene Gate-All-Around Nanowire Poly-Si FETs,” IEEE TRANSACTIONS ON NANOTECHNOLOGY, 19, pp.322-327, 2020.
  4. Y. Lee, H. W. Chen, C. H. Shen, P. Y. Kuo, C. C. Chung, Y. E. Huang, H. Y. Chen, and T. S. Chao*, “Effect of Seed Layer on Gate-All-Around Poly-Si Nanowire Negative-Capacitance FETs With MFMIS and MFIS Structures: Planar Capacitors to 3-D FETs,” IEEE Trans. On Electron Devices, 67 (2), pp. 711-716, 2020.
  5. Y. Lee, H. W. Chen, C. H. Shen, P. Y. Kuo, C. C. Chung, Y. .E. Huang, H. Y. Chen, T. S. Chao* , ” Experimental Demonstration of Stacked Gate-All-Around Poly-Si Nanowires Negative Capacitance FETs with Internal Gate Featuring Seed Layer and Free of Post-Metal Annealing Process,” IEEE Electron Device Letters, 40 (11), 1708-1711, 2019.
  6. C. Chung, C. M. Ko, and T. S. Chao*, “Self -Limited Low-Temperature Trimming and Fully Silicided S/D for Vertically Stacked Cantilever Gate-All-Around Poly-Si Junctionless Nanosheet Transistors,” IEEE J. OF the Electron Devices Society, 7, 959-963, 2019.
  7. R. Hsieh, K. C. Lin, and T. S. Chao*, ” Investigation of Nitrous Oxide Nitridation Temperatures on P-Type Pi-Gate Poly-Si Junctionless Accumulation Mode TFTs,” IEEE J. OF the Electron Devices Society, 7(1), pp. 282-286, 2019.
  8. Y. Lin, C. Y. Tsai, C. H. Shen, C. C. Chung, M. P. V. Kumar, and T. S. Chao*,”Variable-Channel Junctionless Poly-Si FETs: Demonstration and Investigation With Different Body Doping Concentrations,” IEEE Electron Dev. Letters, 39(9), pp.1326-1329, 2018.
  9. P. V. Kumar, Y. J. Lin, K. H. Kao, and T. S. Chao*, “Junctionless FETs With a Fin Body for Multi-V-TH and Dynamic Threshold Operation,” IEEE Trans. On Electron Devices, 65 (8), pp. 3535-3542, 2018.
  10. H. Shen, P. Y. Kuo, C. C. Chung, S. Y. Lee, and T. S. Chao*, “Stacked Sidewall-Damascene Double-Layer Poly-Si Trigate FETs With RTA-Improved Crystallinity,” IEEE Electron Dev. Letters, 39(4), pp.512-515, 2018.
  11. Chris C. C. Chung, C. H. Shen, J. Y. Lin, C. C. Chin, and S. Chao*, “Vertically Stacked Cantilever n-Type Poly-Si Junctionless Nanowire Transistor and Its Series Resistance Limit,” IEEE Trans. On Electron Devices, 65 (2), pp. 756-762, 2018.
  12. R. Hsieh, Y. D. Chan, P. Y. Kuo, and T. S. Chao*, “Investigation of Channel Doping Concentration and Reverse Boron Penetration on P-Type Pi-Gate Poly-Si Junctionless Accumulation Mode FETs,” IEEE J. of The Electron Dev. Soc., 6(1), pp. 314-319, 2018.
  13. Y. Lin, M. P. V. Kumar, and T. S. Chao*, “Junctionless Nanosheet (3 nm) Poly-Si TFT: Electrical Characteristics and Superior Positive Gate Bias Stress Reliability,” IEEE Electron Dev. Letters, 39(1), pp.8-11, 2018.