專題演講題目:Extreme Ultraviolet: Light up the Bright Future of the World

地點:科學三館地下一樓次軒廳

演講人員:陳立銳 副處長

Speech Outline :
⚫ The importance of lithography technology in semiconductor industry
⚫ What are the challenges of litho process to extend Moore’s Law

⚫ The complexity and knowledge required for EUV lithography
⚫ What did TSMC achieve to make EUV worldwide 1st production

TSMC EUVL RD_陳立銳博士簡介_交大電物_wmc